Product
Semiconductor Producton Equipment
Temporary Bonding Systems
Coater and Developer
Cleaning Systems
Phosphoric Acid Process Equipment
CMP Slurry Delivery Systems
Hot Topics
For Semiconductor Production Equipment Makers
Clean Transfer Robot
Having issues with pre-aligners?
- TAIKO wafers with deformation in the center
- Reduce force due to miniaturization of memory wafers
- Glass wafers with non-uniform shape at the edge
- Need to change vacuum hold type to other type
- Possible to provide tool to check if alignment is possible by yourself
Excimer Irradiation Unit
UV LED Irradiation Unit
Slit Coater
Manual Coater For R&D of PLP
Slit Coater
Slit Coater with glass floating mechanism
Evolution of Slit Coater (Under development)
- Heated Slit Coater
- Compact Slit Coater
