Semiconductor Producton Equipment

Semiconductor Producton Equipment

Coater and Developer

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For Semiconductor Production Equipment Makers

Clean Transfer Robot

Having issues with pre-aligners?

  • TAIKO wafers with deformation in the center
  • Reduce force due to miniaturization of memory wafers
  • Glass wafers with non-uniform shape at the edge
  • Need to change vacuum hold type to other type
  • Possible to provide tool to check if alignment is possible by yourself

Slit Coater

Manual Coater For R&D of PLP

Slit Coater

Slit Coater with glass floating mechanism

Evolution of Slit Coater (Under development)

  • Heated Slit Coater
  • Compact Slit Coater
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